LEXT OLS3000

The confocal scanning laser microscope "LEXT OLS3000" has accomplished unprecedented high-resolution observations and high repeatability performance. It also enables brightfield, darkfield and differential interference contrast (DIC) white light observations – a function introduced to this type of microscope for the first time in the world.

SPECIAL of Laser Microscope

RELIABILITY

Highly reliable observations and measurements

SPEED

High speeds

PERFOMANCE

Basic performance of the microscope

HARDWARE

Reliable hardware

• High-resolution image observation:
  Capability of observing line/space patterns of 0.12µm
• Planar measurement:
  High-accuracy planar(XY) measurement with repeatability of less than 3s(n-1)=0.02µm
• Bump measurement:
  High-accuracy bump measurement with repeatability of less than 3s(n-1)=0.05+0.002Lµm
• Roughness measurement:
  Noncontact roughness measurement with the level of Rmax=0.1µm
• Film thickness measurement:
  Measurement of the thickness of transparent films of 1mm to 1µm in thickness

Typical applications