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LEXT RELIABILITY

RELIABILITY


The 408nm wavelength compatible optical system enables a planar (XY) resolution of
0.12mm and repeatability of line width measurements as high as 3s(n-1)=0.02µm

  • A 408nm wavelength semiconductor laser is used as a light source.
  • Chromatic aberration is removed because the entire from the objective to telan lenses are optimally designed for a 408 nm semiconductor laser.

Schematic diagram of the optical path


0.12µmL/S


A high-precision Z-detection method and the CFO search combine to make 3s=0.05+0.002L
repeatability possible.

  • The Z-position is determined by computing the results of scanning, not by moving the objective lens and locating the brightest point.
  • Olympus’s proprietary technology makes possible high repeatability, irrespective of who makes the measurement or how the measurement is made.

Two observation modes are available: Contrast Mode, that allows you to observe a specimen with high contrast, and Enhance Mode, that allows you to observe a specimen clearly even if its reflectance varies within the field of view.

  • Contrast Mode is recommended as the normal observation mode.
  • Enhance Mode, which is a newly developed observation mode, is recommended when the reflectance of a specimen varies greatly (for example, a printed circuit board, a polishing pad, etc.) or when the slope detection sensitivity must be increased to observe a three-dimensional structure clearly.