Ultrahigh-Precision Type With
Maximum Magnificaion Model
With an ultrahigh-precision stage and maximum magnification module, it measures fine workpieces with ultrahigh accuracy
(e.g., critical dimensions on patterned masks and bump heights)
Applications
Wafer level CSP
Wafer level bump heights
Wafer level SIP
Rerouted masks
Masks for MEMS
- 120X optical magnification enables measurements of rerouted patterns on wafer level CSP
- High precision stage facilitates accurate measurements even for wider dimensions
- Enables measurements of top and bottom widths of etched lines, respectively
- Laser AF facilitates measurements of minuscule bump heights
- Enables evaluation of cross-sectional shapes of bumps and solder balls
Specifications
| Stroke (XxYxZ) | With high magnification lens |
300 x 300x 150 mm (11.8 x 11.8 x 5.9 in.) |
| With low magnification lens |
250 x 300x 150 mm (9.8 x 11.8 x 5.9 in.) | |
| Minimum readout | 0.01µm | |
| Maximum workpiece weight |
30kg (66.1 lb) | |
| Measuring accuracy |
U1X, U1Y | 0.6 + 2L/1000µm (with a workpiece max. 10kg) |
| U2XY | 0.9 + 3L/1000µm (with a workpiece max. 10kg) | |
| Z-axis (L: Length in mm < W.D.) |
0.9 + L/150µm | |
| Camera | B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD | |
| Working distance | High mag. objective lens: 9.8mm Low mag. objective lens: 32mm |
|
| Magnification vs field of view |
High mag. objective lens: 9.8mm Low mag. objective lens: 32mm |
|
| Auto focus | TTL Laser AF and Vision AF | |
| Illumination | Episcopic, diascopic (with high mag. head only), darkfield illumination |
|
| Power source | AC100-240V±10%, 50/60Hz | |
| Power consumption | Max. 13A | |
| Dimensions & weight | Main unit only | 915 x 1060 x 1300 mm, approx. 450kg (36.0 x 41.7 x 51.2 in., 992.1 lb.) |
| Main unit & table | 1000 x 1100 x 1900 mm, approx. 570kg (39.4 x 43.3 x 74.8 in., 1256.6 lb.) |
|
| Controller | 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) | |
| Footprint | 2400 (W) x 1400 (D) mm (94.5 x 55.1 in.) | |
| Host Computer | ||
|---|---|---|
| Main unit | IBM PC/AT (Windows®2000) | |
| Monitor | 17-in. TFT color | |
| Standard Type | Ultrahigh-Precision Type | Large Stroke Type | Ultra-large Stroke Type |
|---|---|---|---|
|
NEXIV VMR-3020 NEXIV VMR-3020 Z120X |
NEXIV VMR-H3030 NEXIV VMR-H3030 Z120X |
NEXIV VMR-6555 NEXIV VMR-6555 Z120X |
NEXIV VMR-10080 NEXIV VMR-10080 Z120X |